The P5000 can be configured with up to four process chambers for 100, 125, 150, or 200mm wafers. Additionally, this tool provides multiple chamber configurations for CVD, Etch and photoresist strip applications, supporting more than 50 unique processes. The Applied Materials P5000 PECVD system is a multichamber Plasma Enhanced Chemical Vapor Deposition tool with standard operating temperatures of C.
Chamber A is configured for highly conformal TEOS (SiO 2 ) film deposition, but is not available for processing at this time. SSSco delivers fully remanuactured and asis equipment, parts and retrofits for AMAT P5000.
Our experience includes CVD DxL& DxZ and Etch MxP and MXP systems. PlasmaEnhanced Chemical Vapor Deposition Steven Glenn July 8, 2009 Thin Films Lab 4. 2 ABSTRACT The objective of this lab was to explore lab and the Applied Materials P5000 from a different point of view. A more hands on approach than usual was used help greater understanding. Control System and set to Manual.
APPLIED MATERIALS P5000 AMP11 AMP11 APPLIED MATERIALS P5000 E1148(6332) 1992 PLASTIC 8" SNNF (Semi Notch No Flat) NO 200mm P5000 2 B4. 70 1250w PID control Heated Gate valve SMA1000 MKS 1Torr Gas Panel manual valve transducer transducer display regulator filter gas panel facilities Hook Up Exhaust APPLICATION NOTES. AMAT P5000 CVD CHAMBER.
Problem: Processes that deposit a nitride passivation layer develop a residue on the inside of the chamber that is very difficult to remove. This layer is so difficult to remove that many users elect to merely wet wipe the chamber. AMAT Applied Materials Precision 5000 Mark II P5000 Bezel and Front Panels Used. 1, 404. 17. Details about AMAT Applied Materials Precision 5000 Nitride PARC PECVD System P5000.
Be the first to write a review. Applied Materials: Model: CVD: MPN: P5000: click Manual and select Automatic. Load the wafers with the flats up in the cassette. Make sure not to crossslot the wafers and make sure that the cassette is well seated. If you are using carrier wafers, only process one at a time. Applied Materials P5000